SC-22 Smart Vacuum Gauge
HYBRID RGA & TOTAL PRESSURE
Vacuum gauge that can also measure residual gas components
For vacuum equipment health check!
◆By monitoring the residual gas components, the health of the vacuum equipment can be monitored and any abnormalities can be immediately detected.
◆This single unit can measure both vacuum (total pressure) and gas composition (partial pressure).
The SC-22 Smart Vacuum Gauge is a completely new type of automatic vacuum gauge developed by our company that can measure both residual gas components and total pressure vacuum.
The total pressure vacuum ranges from atmospheric pressure to an ultra-high vacuum of 10-7Pa, while the partial pressure of the gas components starts automatically when the total pressure reaches about 50Pa, and can be measured from about 10-5Pa to 10-6Pa.
It is possible to measure gas components and check for leaks in the rough pressure range, which has been impossible with conventional gas analyzers.
SC-10 Smart Vacuum Gauge
Quickly detect abnormalities in equipment
Since the Smart Vacuum Gauge can measure the residual gas composition, it is possible to quickly detect leaks and water vapor degassing during the evacuation process.
The two figures below show different exhaust data of the same system. In Figure 1, which shows normal exhaust, water vapor is the main component and determines the total pressure vacuum. If we continue pumping, the nitrogen becomes more than the water vapor after about 10 minutes, and the drop in the total pressure vacuum also stops.
By using the Smart Vacuum Gauge, it is possible to quickly detect abnormalities and their causes that could not be detected by simply monitoring the total pressure vacuum.
1
2
The Smart Vacuum Gauge not only shows that there is a leak, but it can also be sprayed with helium or argon to locate the leak.
Figure 3 shows the Smart Vacuum Gauge data when Argon was sprayed on the leak, and the increase in Argon and decrease in Nitrogen indicates that there is a leak here.
After the leak is stopped, as shown in Figure 4, nitrogen and oxygen decrease, and water vapor becomes the main component, which is the residual gas component of a typical vacuum system.
3
4
No complicated operations required.
No other operation is required, just turn on the power and connect it to your PC.
The full-range vacuum gauge built into the SC-22 measures the total pressure from atmospheric pressure to ultra-high vacuum, and when the total pressure reaches about 50 Pa, the measurement of residual gas components (partial pressure measurement) starts automatically.
When the total pressure reaches about 50 Pa, the measurement of residual gas components (partial pressure measurement) starts automatically. When the pressure is returned to atmospheric pressure, the gas component measurement is automatically turned off, so there is no need to worry.
Measuring pressure range
Residual gas measurement is possible even in low vacuum.
Residual gas measurement operates from a low vacuum of about 50 Pa, so it can detect abnormalities and check for leaks from rough pulling pressure where conventional gas analyzers (RGA) cannot operate.
Tough and dirt-resistant
Since there is no filament, it is resistant to dirt and does not break. Even if the sensor gets dirty, you can easily clean it by yourself.
Easy-to-read and easy-to-use software
Displays total pressure and gas component partial pressure as bar graphs and trend graphs. The axes can be zoomed in and out and scrolled back in time during measurement. Just press the record button to save the data in csv file format, which is convenient for later analysis.
It is compatible with Windows XP/Vista/7/8/10.
Bar Graph Mode
Trend graph mode
Portable
Measurement principle of the SC-10
The SC-22 distinguishes gas components by the color of the discharge of the cold cathode gauge that measures the total pressure. The color (wavelength) of the light differs depending on the gas component, and this is used to measure the component. It is also possible to see the wavelength of the gas component on the spectrum mode screen of the SC-22. Since the gas component measurement section is located on the atmospheric pressure side, it is not contaminated by the gas in the vacuum, and measurement is unaffected by contamination. In addition, the cold cathode gauge has no filament, making it durable and tough to use.
Spectral mode screen
