The use of vacuum is wide-ranging, but we would like to make various proposals especially in the following fields.

I would like to know about equipment for vacuum deposition.

(Electron gun, film thickness meter, ion source for assist deposition, cryochiller, etc.)

  • We are an authorized domestic distributor of vacuum vapor deposition equipment from TELEMARK in the United States.
  • Electron gun for vacuum deposition: Small to large (3kW to 20kW, 2cc to 1800cc class, single to 15 stations, etc.), ultra-high vacuum for research, high-vacuum for production, and dedicated power supply (4kW) From to 20kW) are available.

  • A crystal film thickness monitor and a vapor deposition controller are available. The vapor deposition controller can be combined with an automatic crucible switching type electron gun to fully automatically control multi-text text text text text text layer film deposition of various substances.

  • Ion-assisted ion source for vacuum deposition, compact and compact, from 800W to 3kW. It can also be used for substrate cleaning by low energy ion irradiation.

  • Reducing the partial pressure of water during vacuum deposition is important for film quality. Especially in large-scale thin-film deposition equipment for mass production, it is necessary to reduce the partial pressure of water vapor in a short time. We have a cryochiller that uses a refrigerator that can instantly cool to -150 ° C.

I want to monitor the quality of the vacuum during deposition.

  • You can monitor the partial pressure of water vapor and the presence of leaks during vapor deposition using the Smart Vacuum Gauge, which can monitor residual gas. Convenient for quality control and maintenance of vapor deposition.

I want to know about the vacuum leak test.

  • Vacuum can be used to perform leak tests on various airtight containers. Our smart leak detector can measure the amount of leakage using argon, nitrogen, or air, which is easily available and inexpensive instead of conventional helium.

I would like to know about the vacuum test, I would like to consult.

  • We are equipped with various vacuum devices from ultra-high vacuum to low vacuum, and undertake in-vacuum testing of your products. Please contact us for vacuum resistance environment test, temperature cycle, outgassing measurement, etc.