Titanium Vacuum Products - VISTA Corporation


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Integrated Technology for Titanium/Titanium alloy vacuum chamber and components

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This integrated technology materializes the manufacturing of Titanium based vacuum chambers and components, which have extremely low outgassing rate. It opens the door to easy and quick UHV/XHV creation for everyone.

This technology is the result of long years of research and includes a lot of newly developed technologies; material preparation, surface treatment, welding, blazing, parts manufacturing and also dedicated designing.

Advantages of Titanium/Titanium alloy vacuum chamber

Titanium naturally has many advantages for vacuum applications. Light weight, complete non-magnetism, small heat expansion coefficient, low heat capacity and etc.
Furthermore, our technology added many important features, which makes Titanium suitable for vacuum applications.

1. Our special surface treatment drastically reduces the outgassing rate. Two or three orders lower than the stainless steel. It enables very quick UHV creation.

2. The new special Titanium alloy has stronger and harder characteristics than stainless steel. It enables Titanium Conflat flanges, which is essential for UHV/XHV vacuum systems.

3. Our newly developed manufacturing technology enables vacuum tight Titanium welding and blazing. Any kinds of vacuum chambers are available.

Our Services

We supply custom design vacuum parts, chamber and systems.

  • Flanges
  • Fittings
  • Vacuum chambers
  • Parts of your instruments and components
  • Titanium based vacuum systems


Features of our Titanium products

Ultra low outgassing rate
Our Titanium chamber has an extremely low outgassing rate which is 1/100 - 1/1000 of stainless steel chambers.


After 1year shut off, the pressure built up only 10-7E Torr

Fast pumping to UHV
UHV creation is easy. This example data for about 10L chamber pumped by 300L/sec TMP.
10-10E Torr of UHV was obtained within only 10 hours. Only 150 degree C and 6 hours baking is enough.


Light Weight
Density of Titanium is about 1/2 of stainless steel. It drastically reduces the weight of vacuum systems.

Our Titanium alloy is 70% stronger than stainless steel. Thickness of CF flange can be reduced by 30%.(and less than 1/2 weight)


The light and strong quality is suitable for transfer rods.


The hardness of the alloy is higher than stainless steel. It enables to form a nife edge of the Conflat flange, which is impossible by pure Titanium.

Low thermal expansion coefficient
Thermal expansion coefficient is 1/2 of Stainless steel and 1/3 of Aluminum. It is suitable for delicate mechanical parts used in vacuum.

Small heat capacity
Quick heating up and cooling down shortens the time for baking and saves the energy.

Non magnetic
Completely non magnetic characteristics are suitable for analytical instruments and applications in high magnetic field.

Characteristic Comparison

Titanium Alloy Pure Titanium

Stainless Steel

(AlSl 304)




(10 3E kg・㎥)

4.5 < 7.9 2.7




150 190 60

Expansion Coefficient


8.4 < 17 24

Thermal Conductivity


17 < 16 137

Heat Capacity Per unit volume


2.1 < 3.8 2.5

Tensile Strength


650 340 516 175

Young's Modulus


105 106 200 70
Magnetism No No Little No


バルブ.jpgTitanium Chamber
チタンフランジ-フランジ.jpgTitanium Flange
ゲートバルブ-2.jpgTitanium 1.5" Gate Valve(manual)
PB281749.JPGTitanium Transfer Rod

We also have sold various shape of titanium chambers, titanium nipples, titanium electrical feedthroughs.